发明申请
US20130341178A1 Method and Apparatus for Removing Contaminants from Nitrogen Trifluoride
审中-公开
从三氟化氮中去除污染物的方法和装置
- 专利标题： Method and Apparatus for Removing Contaminants from Nitrogen Trifluoride
- 专利标题（中）： 从三氟化氮中去除污染物的方法和装置
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申请号： US13913069申请日： 2013-06-07
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公开(公告)号： US20130341178A1公开(公告)日： 2013-12-26
- 发明人: Andrew David Johnson , John Giles Langan
- 申请人： AIR PRODUCTS AND CHEMICALS INC.
- 主分类号： B01D53/00
- IPC分类号： B01D53/00
摘要：
A highly pure nitrogen fluoride process fluid having an impurity content of 10 ppm or less can be effectively obtained by using radiation to cause the dissociation of chemical bonds in the impurity to form dissociation products and thereby make the removal of the dissociation products from the process fluid easier than the removal of the impurity from the process fluid.
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