发明申请
- 专利标题: INTEGRATED MAGNETORESISTIVE SENSOR, IN PARTICULAR THREE-AXIS MAGNETORESISTIVE SENSOR AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 集成磁传感器,特别是三轴磁传感器及其制造方法
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申请号: US13996922申请日: 2011-12-23
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公开(公告)号: US20130299930A1公开(公告)日: 2013-11-14
- 发明人: Dario Paci , Marco Morelli , Caterina Riva
- 申请人: Dario Paci , Marco Morelli , Caterina Riva
- 申请人地址: IT Agrate Brianza (MI)
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate Brianza (MI)
- 优先权: ITTO2010A001050 20101223
- 国际申请: PCT/EP2011/074045 WO 20111223
- 主分类号: G01R33/00
- IPC分类号: G01R33/00 ; H01L43/12
摘要:
An integrated magnetoresistive device, where a substrate of semiconductor material is covered, on a first surface, by an insulating layer. A magnetoresistor of ferromagnetic material extends in the insulating layer and defines a sensitivity plane of the sensor. A concentrator of ferromagnetic material including at least one arm, extending in a transversal direction to the sensitivity plane and vertically offset to the magnetoresistor. In this way, magnetic flux lines directed perpendicularly to the sensitivity plane are concentrated and deflected so as to generate magnetic-field components directed in a parallel direction to the sensitivity plane.
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