发明申请
- 专利标题: CHARACTERIZATION STRUCTURE FOR AN ATOMIC FORCE MICROSCOPE TIP
- 专利标题(中): 原子力显微镜提示的特征结构
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申请号: US13869430申请日: 2013-04-24
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公开(公告)号: US20130291236A1公开(公告)日: 2013-10-31
- 发明人: Johann Foucher , Bernd Irmer
- 申请人: Commissariat a I' energie atomique et aux energies alternatives , NANOTOOLS GMBH
- 优先权: EP12165533.6 20120425
- 主分类号: G01Q70/08
- IPC分类号: G01Q70/08
摘要:
A structure for the characterization of a tip of an atomic force microscope, the structure being produced on a substrate and including a first support element located above the substrate; a first characterization element with a constant thickness, the first characterization element being located above the first support element and having an upper flat surface and a lower flat surface covering the upper surface of the first support element with two zones extending beyond the upper surface of the first support element, each zone having a characterization surface at one end which is capable of coming into contact with a tip to be characterized, the upper surface and the lower surface of said first characterization element being parallel to the upper surface of the substrate.
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