发明申请
- 专利标题: MECHANICALLY STABLE NANOPARTICLE THIN FILM COATINGS AND METHODS OF PRODUCING THE SAME
- 专利标题(中): 机械稳定的纳米薄膜薄膜及其制造方法
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申请号: US13877005申请日: 2011-09-23
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公开(公告)号: US20130202866A1公开(公告)日: 2013-08-08
- 发明人: Daeyeon Lee
- 申请人: Daeyeon Lee
- 申请人地址: US PA Philadelphia
- 专利权人: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA
- 当前专利权人: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA
- 当前专利权人地址: US PA Philadelphia
- 国际申请: PCT/US2011/052920 WO 20110923
- 主分类号: C23C16/44
- IPC分类号: C23C16/44 ; C23C16/513 ; C23C16/56
摘要:
A method for treating a surface comprises depositing a first coating comprising a plurality of nanoparticles on a substrate, wherein the first coating defines a plurality of interstitial spaces; and depositing a second coating comprising metals, metal oxides, or mixtures thereof by atomic layer deposition (ALD) on the first coating and within the interstitial spaces defined by the first coating. A mechanically stable coated product comprises a substrate; a first coating comprising a plurality of nanoparticles deposited on the substrate; wherein the first coating defines a plurality of interstitial spaces; and a second coating comprising metals, metal oxides, or mixtures thereof deposited by atomic layer deposition (ALD) on the first coating and within the interstitial spaces defined by the first coating. The mechanically stable thin film coating imparts mechanical robustness to the nanoparticles thin film, and retains or improves the desired optical and wetting properties of the nanoparticle thin film.
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