Invention Application
- Patent Title: BACKSIDE INTEGRATION OF RF FILTERS FOR RF FRONT END MODULES AND DESIGN STRUCTURE
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Application No.: US13354705Application Date: 2012-01-20
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Publication No.: US20130187246A1Publication Date: 2013-07-25
- Inventor: James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
- Applicant: James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L29/84
- IPC: H01L29/84 ; G06F17/50 ; H01L21/02

Abstract:
A design structure for an integrated radio frequency (RF) filter on a backside of a semiconductor substrate includes: a device on a first side of a substrate; a radio frequency (RF) filter on a backside of the substrate; and at least one substrate conductor extending from the front side of the substrate to the backside of the substrate and electrically coupling the RF filter to the device.
Public/Granted literature
- US09058455B2 Backside integration of RF filters for RF front end modules and design structure Public/Granted day:2015-06-16
Information query
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