Invention Application
- Patent Title: BIOSENSOR CAPACITOR
- Patent Title (中): 生物传感器电容器
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Application No.: US13353523Application Date: 2012-01-19
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Publication No.: US20130186754A1Publication Date: 2013-07-25
- Inventor: Kristin M. Ackerson , John J. Ellis-Monaghan , Jeffrey P. Gambino , Yen Li Lim
- Applicant: Kristin M. Ackerson , John J. Ellis-Monaghan , Jeffrey P. Gambino , Yen Li Lim
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: G01N27/403
- IPC: G01N27/403 ; G01N27/416 ; H01L21/283

Abstract:
A biosensor capacitor, including a dielectric layer; a first metal layer in the dielectric layer; a passivation layer over the dielectric layer and the first metal layer; an isolation layer over the passivation layer; a probe DNA electrode connected to the first metal layer; a counter electrode connected to the first metal layer wherein the counter electrode forms an enclosure around the probe DNA electrode; and a bond pad connected to the first metal layer.
Public/Granted literature
- US08986523B2 Biosensor capacitor Public/Granted day:2015-03-24
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