Invention Application
US20130186754A1 BIOSENSOR CAPACITOR 有权
生物传感器电容器

BIOSENSOR CAPACITOR
Abstract:
A biosensor capacitor, including a dielectric layer; a first metal layer in the dielectric layer; a passivation layer over the dielectric layer and the first metal layer; an isolation layer over the passivation layer; a probe DNA electrode connected to the first metal layer; a counter electrode connected to the first metal layer wherein the counter electrode forms an enclosure around the probe DNA electrode; and a bond pad connected to the first metal layer.
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