发明申请
- 专利标题: PLASMA FILM DEPOSITION DEVICE
- 专利标题(中): 等离子体膜沉积装置
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申请号: US13486131申请日: 2012-06-01
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公开(公告)号: US20130160710A1公开(公告)日: 2013-06-27
- 发明人: SHAO-KAI PEI
- 申请人: SHAO-KAI PEI
- 申请人地址: TW Tu-Cheng
- 专利权人: HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人: HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人地址: TW Tu-Cheng
- 优先权: TW100148722 20111226
- 主分类号: C23C16/50
- IPC分类号: C23C16/50
摘要:
A plasma film deposition device includes a film deposition chamber, a plasma generator within the deposition chamber, a plurality of gas carrier boards adjustably mounted to the plasma generator, a gas providing system, and a rotating support bracket. The gas providing system provides working gas and protective gas. The rotating support bracket is assembled within the film deposition chamber, and is aligned with the plasma generator, for holding workpieces in certain orientations. The plasma generator ionizes the working gas into high-temperature plasma, and sprays the high-temperature plasma toward the rotating support bracket to form plasma films on the workpieces. A plasma jet area is defined between the rotating support bracket and the plasma generator, the gas carrier boards eject the protective gas toward the plasma jet area thereby adjusting the shape of the plasma jet area.
公开/授权文献
- US09074280B2 Plasma film deposition device 公开/授权日:2015-07-07
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