发明申请
US20130140959A1 BULK ACOUSTIC WAVE RESONATOR 有权
大容量声波谐振器

BULK ACOUSTIC WAVE RESONATOR
摘要:
Disclosed is a bulk acoustic wave resonator (BAWR). The BAWR includes a bulk acoustic wave resonance unit with a first electrode, a second electrode, and a piezoelectric layer. The piezoelectric layer is disposed between the first electrode and the second electrode. An air edge is formed at a distance from a center of the bulk acoustic wave resonance unit.
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