发明申请
- 专利标题: DISK TYPE MEMS RESONATOR
- 专利标题(中): 盘式MEMS谐振器
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申请号: US13814738申请日: 2011-06-13
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公开(公告)号: US20130134837A1公开(公告)日: 2013-05-30
- 发明人: Takefumi Saito , Noritoshi Kimura
- 申请人: Takefumi Saito , Noritoshi Kimura
- 申请人地址: JP TOKYO
- 专利权人: NIHON DEMPA KOGYO CO., LTD.
- 当前专利权人: NIHON DEMPA KOGYO CO., LTD.
- 当前专利权人地址: JP TOKYO
- 优先权: JP2010-179495 20100810
- 国际申请: PCT/JP2011/063991 WO 20110613
- 主分类号: H01L41/047
- IPC分类号: H01L41/047
摘要:
In order to provide complete removal of a sacrificial layer on a bottom surface of a disk during an etching process, without leaving residue, a disk type resonator of an electrostatic drive type includes a disk type resonator structure; a pair of drive electrodes at a predetermined gap from an outer peripheral portion of the disk type resonator structure and disposed at both sides of the resonator structure so as to face each other; a unit for applying an alternating current bias voltage with a same phase to the drive electrodes; and a detection unit that obtains an output corresponding to an electrostatic capacitance between the disk type resonator structure and the drive electrodes. The disk type resonator structure has a through hole in the center of the disk and is vibrated in a wineglass mode.
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