发明申请
- 专利标题： ZINC OXIDE ANTI-REFLECTION LAYER HAVING A SYRINGE-LIKE STRUCTURE AND METHOD FOR FABRICATING THE SAME
- 专利标题（中）： 具有类似结构的氧化锌抗反射层及其制造方法
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申请号： US13469037申请日： 2012-05-10
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公开(公告)号： US20130129974A1公开(公告)日： 2013-05-23
- 发明人: Kun-Ping Huang , Jr-Hau He , Li Ko Yeh , Kun-Yu Lai
- 申请人： Kun-Ping Huang , Jr-Hau He , Li Ko Yeh , Kun-Yu Lai
- 申请人地址： TW Hsinchu
- 专利权人： INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人： INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人地址： TW Hsinchu
- 优先权： TWTW100142222 20111118
- 主分类号： G02B1/11
- IPC分类号： G02B1/11 ; B05D5/06 ; C23C14/30 ; B32B3/30
摘要：
The disclosure provides a zinc oxide anti-reflection layer having a syringe-like structure and method for fabricating the same. The zinc oxide anti-reflection layer includes: a zinc oxide lower portion, wherein the zinc oxide lower portion has a nanorod array structure; and a zinc oxide upper portion connected to the zinc oxide lower portion, wherein the zinc oxide anti-reflection layer has a syringe-like structure.
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