发明申请
- 专利标题: POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
- 专利标题(中): 积极的组合和绘图过程
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申请号: US13584463申请日: 2012-08-13
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公开(公告)号: US20130056653A1公开(公告)日: 2013-03-07
- 发明人: Jun HATAKEYAMA , Daisuke KORI
- 申请人: Jun HATAKEYAMA , Daisuke KORI
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-191219 20110902; JP2012-112531 20120516
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G21K5/00 ; G03F7/20
摘要:
The invention provides a positive resist composition comprising, as base resins contained therein, (A) a polymer having a weight-average molecular weight of 1000 to 500000 and containing a repeating unit which contains a structure having a hydrogen atom of a carboxyl group thereof substituted with an acid-labile group having a cyclic structure and (B) a novolak resin of a substituted or an unsubstituted naphtholphthalein, and in addition, a photo acid generator. There can be provided a positive resist composition having an appropriate absorption to form a pattern on a highly reflective substrate, excellent characteristics in adhesion and implantation onto a non-planar substrate, a good pattern profile after light exposure, and an ion implantation resistance at the time of ion implantation; and a patterning process.
公开/授权文献
- US08574816B2 Positive resist composition and patterning process 公开/授权日:2013-11-05
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