Invention Application
- Patent Title: POLE FOR MAGNETIC RECORDING
- Patent Title (中): 磁记录
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Application No.: US13602915Application Date: 2012-09-04
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Publication No.: US20130010387A1Publication Date: 2013-01-10
- Inventor: XiaoMin Yang , Shuaigang Xiao , Jie Gong , Michael Seigler
- Applicant: XiaoMin Yang , Shuaigang Xiao , Jie Gong , Michael Seigler
- Applicant Address: US CA Cupertino
- Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee Address: US CA Cupertino
- Main IPC: G11B5/127
- IPC: G11B5/127

Abstract:
A method for forming a magnetic write pole with a trapezoidal cross-section is described. The method consists of first forming a magnetic seedlayer on a base followed by depositing a removable material layer on the seedlayer, and then a resist layer on the removable material layer. A trench is then formed in the resist, and the resist is heated to cause the cross-sectional profile of the trench to assume a trapezoidal shape. The resist is then capped with another resist layer and further heated to cause the width of the trapezoidal trench to become narrower. The cap layer and removable material layer at the bottom of the trench are then removed and the trench filled with magnetic material by electroplating. The resist and seedlayer external to the trench are finally removed to form a write pole with a trapezoidal cross-section.
Public/Granted literature
- US08848315B2 Pole for magnetic recording Public/Granted day:2014-09-30
Information query
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