Invention Application
- Patent Title: PHASE-SHIFTING ELEMENT AND PARTICLE BEAM DEVICE HAVING A PHASE-SHIFTING ELEMENT
- Patent Title (中): 具有相移元件的相移元件和颗粒光束装置
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Application No.: US13462140Application Date: 2012-05-02
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Publication No.: US20130001445A1Publication Date: 2013-01-03
- Inventor: Rasmus SCHRÖDER , Bastian BARTON , Gerd BENNER , Harald ROSE
- Applicant: Rasmus SCHRÖDER , Bastian BARTON , Gerd BENNER , Harald ROSE
- Priority: DE102007007923.2 20070214
- Main IPC: G21K1/087
- IPC: G21K1/087

Abstract:
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.
Public/Granted literature
- US08436302B2 Phase-shifting element and particle beam device having a phase-shifting element Public/Granted day:2013-05-07
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