发明申请
- 专利标题： TEMPLATE, TEMPLATE MANUFACTURING METHOD, AND TEMPLATE MANUFACTURING APPARATUS
- 专利标题（中）： 模板，模板制造方法和模板制造设备
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申请号： US13424879申请日： 2012-03-20
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公开(公告)号： US20120315349A1公开(公告)日： 2012-12-13
- 发明人: Yingkang ZHANG , Masafumi ASANO
- 申请人： Yingkang ZHANG , Masafumi ASANO
- 优先权： JP2011-128280 20110608
- 主分类号： B29C33/40
- IPC分类号： B29C33/40 ; B29C41/52
摘要：
According to one embodiment, a template includes: a base substrate; and a pattern portion provided on the base substrate and including a concave-convex pattern formed from a master pattern. The concave-convex pattern is provided in a distorted state with respect to the master pattern in accordance with a distortion of an underlying pattern formed on a substrate to which a shape of the concave-convex pattern is to be transferred.
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