Invention Application
- Patent Title: LASER ANNEAL FOR IMAGE SENSORS
- Patent Title (中): 激光雷达用于图像传感器
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Application No.: US13566638Application Date: 2012-08-03
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Publication No.: US20120302000A1Publication Date: 2012-11-29
- Inventor: Duli Mao , Hsin-Chih Tai , Vincent Venezia , Yin Qian , Howard E. Rhodes
- Applicant: Duli Mao , Hsin-Chih Tai , Vincent Venezia , Yin Qian , Howard E. Rhodes
- Applicant Address: US CA Santa Clara
- Assignee: OMNIVISION TECHNOLOGIES, INC.
- Current Assignee: OMNIVISION TECHNOLOGIES, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L31/0232
- IPC: H01L31/0232

Abstract:
A technique for fabricating an image sensor including a pixel circuitry region and a peripheral circuitry region includes fabricating front side components on a front side of the image sensor. A dopant layer is implanted on a backside of the image sensor. A anti-reflection layer is formed on the backside and covers a first portion of the dopant layer under the pixel circuitry region while exposing a second portion of the dopant layer under the peripheral circuitry region. The first portion of the dopant layer is laser annealed from the backside of the image sensor through the anti-reflection layer. The anti-reflection layer increases a temperature of the first portion of the dopant layer during the laser annealing.
Public/Granted literature
- US08318529B1 Laser anneal for image sensors Public/Granted day:2012-11-27
Information query
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