发明申请
- 专利标题: EXPOSURE SYSTEMS FOR INTEGRATED CIRCUIT FABRICATION
- 专利标题(中): 集成电路制造的接触系统
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申请号: US13419761申请日: 2012-03-14
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公开(公告)号: US20120292535A1公开(公告)日: 2012-11-22
- 发明人: Jin Choi , Jin-Ha Jeong , Vladimir Urazaev , Hea-Yun Lee
- 申请人: Jin Choi , Jin-Ha Jeong , Vladimir Urazaev , Hea-Yun Lee
- 优先权: KR10-2011-0046577 20110518
- 主分类号: G21K5/04
- IPC分类号: G21K5/04
摘要:
Exposure systems include a beam generator, which is configured to irradiate source beams in a direction of an object to be exposed by the source beams, along with first and second beam shapers. The first beam shaper, which is disposed proximate the beam generator, has a first aperture therein positioned to pass through the source beams received from the beam generator. The second beam shaper is disposed proximate the first beam shaper. The second beam shaper includes a plate having a second aperture therein, which is positioned to receive the source beams that are passed through the first aperture of the first beam shaper. The second beam shaper further includes a first actuator and a first shift screen mechanically coupled to the first actuator.
公开/授权文献
- US08563951B2 Exposure systems for integrated circuit fabrication 公开/授权日:2013-10-22
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