发明申请
US20120270346A1 ASYMMETRIC DBR PAIRS COMBINED WITH PERIODIC AND MODULATION DOPING TO MAXIMIZE CONDUCTION AND REFLECTIVITY, AND MINIMIZE ABSORPTION
有权
结合周期性和调制功能的不对称DBR配对以最大限度地提高导电性和反射性,并最小化吸收
- 专利标题: ASYMMETRIC DBR PAIRS COMBINED WITH PERIODIC AND MODULATION DOPING TO MAXIMIZE CONDUCTION AND REFLECTIVITY, AND MINIMIZE ABSORPTION
- 专利标题(中): 结合周期性和调制功能的不对称DBR配对以最大限度地提高导电性和反射性,并最小化吸收
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申请号: US13537340申请日: 2012-06-29
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公开(公告)号: US20120270346A1公开(公告)日: 2012-10-25
- 发明人: Ralph H. Johnson , James Guenter
- 申请人: Ralph H. Johnson , James Guenter
- 申请人地址: US CA Sunnyvale
- 专利权人: FINISAR CORPORATION
- 当前专利权人: FINISAR CORPORATION
- 当前专利权人地址: US CA Sunnyvale
- 主分类号: H01L33/60
- IPC分类号: H01L33/60
摘要:
Methods for fabricating an optical device that exhibits improved conduction and reflectivity, and minimized absorption. Steps include forming a plurality of mirror periods designed to reflect an optical field having peaks and nulls. The formation of a portion of the plurality of minor periods includes forming a first layer having a thickness of less than one-quarter wavelength of the optical field; forming a first compositional ramp on the first layer; and forming a second layer on the compositional ramp, the second layer having a different index of refraction than the first layer and having a thickness such that the nulls of the optical field occur within the second layer and not within the compositional ramp, and wherein forming the second layer further comprises heavily doping the second layer at a location of the nulls of the optical field.
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