发明申请
US20120178206A1 CMOS IMAGE SENSOR HAVING DOUBLE GATE INSULATOR THEREIN AND METHOD FOR MANUFACTURING THE SAME
有权
具有双门绝缘体的CMOS图像传感器及其制造方法
- 专利标题: CMOS IMAGE SENSOR HAVING DOUBLE GATE INSULATOR THEREIN AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 具有双门绝缘体的CMOS图像传感器及其制造方法
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申请号: US13424957申请日: 2012-03-20
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公开(公告)号: US20120178206A1公开(公告)日: 2012-07-12
- 发明人: Ju-Il Lee
- 申请人: Ju-Il Lee
- 优先权: KR10-2003-0027810 20030430
- 主分类号: H01L31/18
- IPC分类号: H01L31/18
摘要:
A method for manufacturing a CMOS image sensor includes: preparing a semiconductor substrate incorporating therein a p-type epitaxial layer by epitaxially growing up an upper portion of the semiconductor substrate; forming a pixel array in one predetermined location of the semiconductor substrate, the pixel array having a plurality of transistors and a photodiode therein, wherein each transistor employs a gate insulator with a thickness ranging from 40 Å to 90 Å; and forming a logic circuit in the other predetermined location of the semiconductor substrate, the logic circuit having at least one transistor, wherein the transistor employs a gate insulator with a thickness ranging from 5 Å to 40 Å.
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