发明申请
- 专利标题: LOADING DEVICE AND SPUTTERING DEVICE USING SAME
- 专利标题(中): 使用相同的装载装置和喷射装置
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申请号: US13091136申请日: 2011-04-21
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公开(公告)号: US20120160675A1公开(公告)日: 2012-06-28
- 发明人: CHUNG-PEI WANG
- 申请人: CHUNG-PEI WANG
- 申请人地址: TW Tu-Cheng
- 专利权人: HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人: HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人地址: TW Tu-Cheng
- 优先权: TW99145756 20101224
- 主分类号: C23C14/34
- IPC分类号: C23C14/34
摘要:
A sputtering device includes a main body and a loading device received in the main body. The main body includes a top portion, a bottom portion, and a sidewall connected between the top portion and the bottom portion, an upper bearing mounted on the top portion, and a lower bearing mounted on the bottom portion. The loading device includes an outer frame, an inner frame received in the outer frame, and a gear device arranged between the outer frame and the in inner frame. The outer frame is rotatably connected to the upper bearing and includes a plurality of first rods arranged in a first circle. The inner frame is rotatably connected to the lower bearing and includes a plurality of second rods arranged in a second circle. The gear device is configured for bringing the outer frame and the inner frame to rotate in opposite directions.
公开/授权文献
- US08524054B2 Loading device and sputtering device using same 公开/授权日:2013-09-03
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