发明申请
US20120149160A1 LAYOUT METHOD OF SEMICONDUCTOR DEVICE WITH JUNCTION DIODE FOR PREVENTING DAMAGE DUE TO PLASMA CHARGE 有权
具有连接二极管的半导体器件的布局方法,用于防止等离子体充电造成的损坏

  • 专利标题: LAYOUT METHOD OF SEMICONDUCTOR DEVICE WITH JUNCTION DIODE FOR PREVENTING DAMAGE DUE TO PLASMA CHARGE
  • 专利标题(中): 具有连接二极管的半导体器件的布局方法,用于防止等离子体充电造成的损坏
  • 申请号: US13364362
    申请日: 2012-02-02
  • 公开(公告)号: US20120149160A1
    公开(公告)日: 2012-06-14
  • 发明人: Soo-Young KimJong-Hak Won
  • 申请人: Soo-Young KimJong-Hak Won
  • 优先权: KR10-2007-0030043 20070327
  • 主分类号: H01L21/336
  • IPC分类号: H01L21/336
LAYOUT METHOD OF SEMICONDUCTOR DEVICE WITH JUNCTION DIODE FOR PREVENTING DAMAGE DUE TO PLASMA CHARGE
摘要:
A layout method of junction diodes for preventing damage caused by plasma charge includes forming an active layer to form a plurality of active regions in a unit layout pattern; forming a gate layer to form a plurality of gate regions on the active regions; forming a first conductive type doping region in at least one of the plurality of active regions within a well layer where a second conductive type well region is formed to form a first conductive type active region; forming a second conductive type doping region in at least one of the plurality of active regions outside of the second conductive type well region to form a second conductive type active region; and forming a second conductive type doping region connected with the gate regions to form a junction diode in at least one active region between the first and second conductive type active regions.
信息查询
0/0