发明申请
- 专利标题: ELECTROMECHANICAL TRANSDUCER AND METHOD FOR DETECTING SENSITIVITY VARIATION OF ELECTROMECHANICAL TRANSDUCER
- 专利标题(中): 机电传感器及检测机电传感器灵敏度变化的方法
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申请号: US13378000申请日: 2010-06-18
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公开(公告)号: US20120087205A1公开(公告)日: 2012-04-12
- 发明人: Makoto Takagi , Masao Majima
- 申请人: Makoto Takagi , Masao Majima
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-146937 20090619
- 国际申请: PCT/JP10/60797 WO 20100618
- 主分类号: H04B17/00
- IPC分类号: H04B17/00 ; G01V1/155
摘要:
An electromechanical transducer includes a plurality of elements each including a first electrode and a second electrode with a gap therebetween, a voltage applying unit configured to apply an AC voltage to the first electrode, and a sensitivity variation computing unit configured to compute a sensitivity variation for each of the elements using a signal output from the second electrode of the element due to the application of the AC voltage.
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