发明申请
- 专利标题: DEFECT DETECTION SYSTEM AND METHOD
- 专利标题(中): 缺陷检测系统和方法
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申请号: US12879215申请日: 2010-09-10
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公开(公告)号: US20120016600A1公开(公告)日: 2012-01-19
- 发明人: Jui-Yiao SU , Yu-Liang Chung , Chun-Chieh Wang , Chien-Feng Wu , Yan-Chen Liu
- 申请人: Jui-Yiao SU , Yu-Liang Chung , Chun-Chieh Wang , Chien-Feng Wu , Yan-Chen Liu
- 申请人地址: TW Hsinchu
- 专利权人: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人地址: TW Hsinchu
- 优先权: TW099123238 20100715
- 主分类号: G01N29/46
- IPC分类号: G01N29/46 ; G01N29/04 ; G06F19/00
摘要:
A defect detection system and method enable a fastened crystalline silicon product to generate micro-vibration by a micro-vibration excitation device, so as to enable the crystalline silicon product to generate an excitation signal, then to acquire the excitation signal by a acquisition device, so as to analyze the excitation signal acquired by the acquisition device in the time and frequency domain by an analysis detection device with a specific analysis, and to obtain an analysis result, at last, determine a defect state of the crystalline silicon product according to the analysis result.
公开/授权文献
- US08712704B2 Defect detection system and method 公开/授权日:2014-04-29
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