Invention Application
US20120004016A1 FILTERING CIRCUIT WITH COUPLED BAW RESONATORS AND HAVING IMPEDANCE MATCHING ADAPTATION
审中-公开
带联轴器谐波器的滤波电路,并具有阻抗匹配适配
- Patent Title: FILTERING CIRCUIT WITH COUPLED BAW RESONATORS AND HAVING IMPEDANCE MATCHING ADAPTATION
- Patent Title (中): 带联轴器谐波器的滤波电路,并具有阻抗匹配适配
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Application No.: US13158163Application Date: 2011-06-10
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Publication No.: US20120004016A1Publication Date: 2012-01-05
- Inventor: Jean-François Carpentier , Pierre Bar , Alexandre Volatier
- Applicant: Jean-François Carpentier , Pierre Bar , Alexandre Volatier
- Applicant Address: FR Montrouge
- Assignee: STMICROELECTRONICS S.A.
- Current Assignee: STMICROELECTRONICS S.A.
- Current Assignee Address: FR Montrouge
- Priority: FR0806971 20081212
- Main IPC: H04W88/02
- IPC: H04W88/02 ; H01L41/22 ; H03H7/38 ; H03H9/56 ; H03H9/52

Abstract:
A filtering circuit includes a substrate; an acoustic mirror or a membrane destined to act as a mechanical support of acoustic resonators and to isolate these resonators from the substrate; a first section comprising an upper resonator and a lower resonator coupled to each other by at least one acoustic coupling layer; and a second section comprising an upper resonator and a lower resonator coupled to each other by at least one acoustic coupling layer. The filtering circuit also includes metallic vias implementing an inter stage connection between the lower resonator of a section and the upper resonator of the other section. Preferably, the upper resonators exhibit a piezoelectric layer having a thickness selected in order to achieve an optimal impedance matching between the said first and second sections.
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