Invention Application
- Patent Title: FILM WRAPPED NFET NANOWIRE
- Patent Title (中): 薄膜封装NFET纳米线
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Application No.: US13184004Application Date: 2011-07-15
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Publication No.: US20110275198A1Publication Date: 2011-11-10
- Inventor: Dureseti Chidambarrao , Lidija Sekaric
- Applicant: Dureseti Chidambarrao , Lidija Sekaric
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L21/20
- IPC: H01L21/20 ; B82Y40/00

Abstract:
A semiconductor structure includes an n-channel field effect transistor (NFET) nanowire, the NFET nanowire comprising a film wrapping around a core of the NFET nanowire, the film wrapping configured to provide tensile stress in the NFET nanowire. A method of making a semiconductor structure includes growing a film wrapping around a core of an n-channel field effect transistor (NFET) nanowire of the semiconductor structure, the film wrapping being configured to provide tensile stress in the NFET nanowire.
Public/Granted literature
- US08232165B2 Film wrapped NFET nanowire Public/Granted day:2012-07-31
Information query
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