发明申请
US20110266705A1 TEMPLATE REPAIR METHOD, PATTERN FORMING METHOD, AND TEMPLATE REPAIR APPARATUS
审中-公开
模式修复方法，图案形成方法和模板修复装置
- 专利标题： TEMPLATE REPAIR METHOD, PATTERN FORMING METHOD, AND TEMPLATE REPAIR APPARATUS
- 专利标题（中）： 模式修复方法，图案形成方法和模板修复装置
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申请号： US13069186申请日： 2011-03-22
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公开(公告)号： US20110266705A1公开(公告)日： 2011-11-03
- 发明人: Shinichi ITO , Takuya KONO
- 申请人： Shinichi ITO , Takuya KONO
- 优先权： JP2010-104564 20100428
- 主分类号： B29C33/38
- IPC分类号： B29C33/38 ; B05C3/02 ; B28B7/38
摘要：
A template repair method according to one embodiment is a method for repairing a template including a template base material and a first mold release layer formed on a pattern surface of the template base material, and a restorative material is supplied to the pattern surface of the template base material in the template repair method. The restorative material has affinity to the base material and non-affinity to the mold release layer.
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