发明申请
- 专利标题: Tomographic Atom Probe Comprising an Electro-Optical Generator of High-Voltage Electrical Pulses
- 专利标题(中): 包含高压电脉冲电光发生器的层析原子探针
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申请号: US13130520申请日: 2009-10-13
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公开(公告)号: US20110260046A1公开(公告)日: 2011-10-27
- 发明人: François Vurpillot , Alain Bostel
- 申请人: François Vurpillot , Alain Bostel
- 申请人地址: FR Paris FR Gennevilliers
- 专利权人: CNRS,CAMECA
- 当前专利权人: CNRS,CAMECA
- 当前专利权人地址: FR Paris FR Gennevilliers
- 优先权: FR0806550 20081121
- 国际申请: PCT/EP09/63346 WO 20091013
- 主分类号: H01J49/00
- IPC分类号: H01J49/00 ; G01N27/64
摘要:
A tomographic atom probe uses electrical pulses applied to an electrode in order to carry out evaporation of the sample being analyzed. In order to produce these electrical pulses, the tomographic atom probe comprises a high-voltage generator connected to an electrode by an electrical connection comprising a chip of semiconductor material. The probe also comprises a light source which can be controlled in order to generate light pulses which are applied to the semiconductor chip. Throughout the illumination, the chip is rendered conductive, which puts the high-voltage generator and the electrode in electrical contact so that a potential step is applied to the latter. The probe also comprises means for applying a voltage step of opposite amplitude to the previous step at the end of a time interval Δt0, so that the electrode finally receives a voltage pulse of duration Δt0.
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