发明申请
- 专利标题： AUTO-SEQUENCING MULTI-DIRECTIONAL INLINE PROCESSING APPARATUS
- 专利标题（中）： 自动排序多向在线处理设备
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申请号： US12965798申请日： 2010-12-10
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公开(公告)号： US20110142573A1公开(公告)日： 2011-06-16
- 发明人: Wendell Thomas BLONIGAN , Masato TOSHIMA , Kam S. LAW , David Eric BERKSTRESSER , Steve KLEINKE , Craig Lyle STEVENS
- 申请人： Wendell Thomas BLONIGAN , Masato TOSHIMA , Kam S. LAW , David Eric BERKSTRESSER , Steve KLEINKE , Craig Lyle STEVENS
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike the prior art it does not utilize trays.
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