发明申请
- 专利标题: METHOD FOR MANUFACTURING TWIN BIT STRUCTURE CELL WITH ALUMINUM OXIDE LAYER
- 专利标题(中): 用氧化铝层制造双位结构单元的方法
-
申请号: US12965808申请日: 2010-12-10
-
公开(公告)号: US20110140190A1公开(公告)日: 2011-06-16
- 发明人: MIENO FUMITAKE
- 申请人: MIENO FUMITAKE
- 申请人地址: CN Shanghai
- 专利权人: Semiconductor Manufacturing International (Shanghai) Corporation
- 当前专利权人: Semiconductor Manufacturing International (Shanghai) Corporation
- 当前专利权人地址: CN Shanghai
- 优先权: CN200910201181.3 20091215
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L21/336
摘要:
A method for manufacturing a twin bit cell structure with an aluminum oxide material includes forming a gate dielectric layer overlying a semiconductor substrate and a polysilicon gate structure overlying the gate dielectric layer. An undercut region is formed in each side of the gate dielectric layer underneath the polysilicon gate structure. Thereafter, an oxidation process is performed to form a first silicon oxide layer on a peripheral surface of the polysilicon gate structure and a second silicon oxide layer on an exposed surface of the semiconductor substrate. Then, an aluminum oxide material is deposited over the first and second silicon oxide layers including the undercut region and the gate dielectric layer. The aluminum oxide material is selectively etched to form an insert region in a portion of the undercut region. A sidewall spacer is formed to isolate and protect the exposed aluminum oxide material and the polysilicon gate structure.
公开/授权文献
信息查询
IPC分类: