发明申请
- 专利标题: LIGHT-BASED SEALING AND DEVICE PACKAGING
- 专利标题(中): 基于光的密封和设备包装
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申请号: US12605246申请日: 2009-10-23
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公开(公告)号: US20110096508A1公开(公告)日: 2011-04-28
- 发明人: Ion Bita , John H. Hong , Khurshid S. Alam
- 申请人: Ion Bita , John H. Hong , Khurshid S. Alam
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: H05K7/00
- IPC分类号: H05K7/00 ; H01L21/28 ; H01L33/00 ; H05K5/00
摘要:
Systems and methods for manufacturing and packaging electronic devices with light absorptive thin film stacks are provided. In one embodiment, a light is applied to a light absorptive thin film stack disposed between a substrate and a backplate to seal the substrate to the backplate. In another embodiment, the light absorptive thin film stack includes a plurality of thin film layers. In yet another embodiment, the light absorptive thin film stack includes a spacer layer over a reflective layer and an absorber layer over the spacer layer. In still another embodiment, the light absorptive thin film stack is less than 200 nanometers thick. In yet a further embodiment, a light absorptive thin film stack is used to seal a substrate having glass, plastic, metal, or silicon to a backplate having glass, plastic, metal, or silicon. Thus, the light absorptive thin film stack is used to seal similar or dissimilar materials through a bonding process.
公开/授权文献
- US08379392B2 Light-based sealing and device packaging 公开/授权日:2013-02-19
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