发明申请
- 专利标题: COMPOUND SINGLE CRYSTAL AND METHOD FOR PRODUCING THE SAME
- 专利标题(中): 化合物单晶及其制造方法
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申请号: US12905355申请日: 2010-10-15
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公开(公告)号: US20110089431A1公开(公告)日: 2011-04-21
- 发明人: Kuniaki YAGI , Takahisa SUZUKI , Yasutaka YANAGISAWA , Masao HIROSE , Noriko SATO , Junya KOIZUMI , Hiroyuki NAGASAWA
- 申请人: Kuniaki YAGI , Takahisa SUZUKI , Yasutaka YANAGISAWA , Masao HIROSE , Noriko SATO , Junya KOIZUMI , Hiroyuki NAGASAWA
- 申请人地址: JP Tokyo
- 专利权人: HOYA CORPORATION
- 当前专利权人: HOYA CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-238765 20091015
- 主分类号: H01L29/24
- IPC分类号: H01L29/24 ; C30B25/18 ; C30B23/02 ; C30B19/12
摘要:
A method for producing a compound single crystal includes a process (I) of growing the compound single crystal while causing an anti-phase boundary and a stacking fault to equivalently occur in a direction parallel to the surface, the stacking fault being attributable to the elements A and B; a process (II) of merging and annihilating the stacking fault, attributable to the element A, and the anti-phase boundary, which occurs in the process (I); a process (III) of vanishing the stacking fault attributable to the element B, which occurs in the process (I); and a process (IV) of completely merging and annihilating the anti-phase boundary. The process (IV) is carried out simultaneously with the processes (II) and (III) or after the processes (II) and (III).
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