Invention Application
- Patent Title: THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME
- Patent Title (中): 薄膜沉积装置及使用其制造有机发光显示装置的方法
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Application No.: US12862125Application Date: 2010-08-24
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Publication No.: US20110053300A1Publication Date: 2011-03-03
- Inventor: Jae-Kwang RYU , Hyun-Sook Park , Yun-Mi Lee , Jong-Heon Kim , Sang-Soo Kim , Ji-Sook Oh
- Applicant: Jae-Kwang RYU , Hyun-Sook Park , Yun-Mi Lee , Jong-Heon Kim , Sang-Soo Kim , Ji-Sook Oh
- Applicant Address: KR Yongin-city
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin-city
- Priority: KR10-2009-0078838 20090825; KR10-2010-0013848 20100216
- Main IPC: H01L51/56
- IPC: H01L51/56 ; B05B17/00
Abstract:
A thin film deposition apparatus that can be applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.
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