发明申请
- 专利标题: METHOD FOR PRODUCING A CONDUCTIVE NANOPARTICLE MEMORY DEVICE
- 专利标题(中): 制造导电纳米材料存储器件的方法
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申请号: US12727593申请日: 2010-03-19
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公开(公告)号: US20110033996A1公开(公告)日: 2011-02-10
- 发明人: Simon DELEONIBUS , Jean-Marie Basset , Paul Campbell , Thibaut Gutel , Paul-Henri Haumesser , Gilles Marchand , Catherine Santini
- 申请人: Simon DELEONIBUS , Jean-Marie Basset , Paul Campbell , Thibaut Gutel , Paul-Henri Haumesser , Gilles Marchand , Catherine Santini
- 申请人地址: FR Paris FR Paris
- 专利权人: COMMISSARIAT A L' ENERGIE ATOMIQUE ET AUX ENERGIES,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- 当前专利权人: COMMISSARIAT A L' ENERGIE ATOMIQUE ET AUX ENERGIES,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- 当前专利权人地址: FR Paris FR Paris
- 优先权: FR0901463 20090327
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; B82Y30/00
摘要:
A method for producing a memory device with nanoparticles, comprising the steps of: a) forming, in a semi-conductor substrate, source and drain regions, and at least one first dielectric on a zone of the substrate arranged between the source and drain regions and intended to form a channel of the memory device, b) deposition of an ionic liquid, comprising nanoparticles of an electrically conductive material in suspension, covering the first dielectric, c) formation of a deposition of nanoparticles on the first dielectric, d) removal of the remaining ionic liquid, e) forming a second dielectric and a control gate on at least one part of the deposition of nanoparticles.
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