发明申请
US20110012018A1 Magnetic Lens, Method for Focusing Charged Particles and Charged Particle Energy Analyzer
有权
磁性透镜,聚焦带电粒子和带电粒子能量分析仪的方法
- 专利标题: Magnetic Lens, Method for Focusing Charged Particles and Charged Particle Energy Analyzer
- 专利标题(中): 磁性透镜,聚焦带电粒子和带电粒子能量分析仪的方法
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申请号: US12837857申请日: 2010-07-16
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公开(公告)号: US20110012018A1公开(公告)日: 2011-01-20
- 发明人: Bryan BARNARD , Christopher Glenister
- 申请人: Bryan BARNARD , Christopher Glenister
- 优先权: GB0912332.4 20090716
- 主分类号: H01J37/141
- IPC分类号: H01J37/141 ; H01J47/00 ; G01N23/22
摘要:
The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system.
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