发明申请
- 专利标题： ALUMINUM OXIDE SINTERED BODY, METHOD FOR PRODUCING THE SAME AND MEMBER FOR SEMICONDUCTOR PRODUCING APPARATUS
- 专利标题（中）： 氧化铝烧结体，其制造方法及半导体制造装置的部件
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申请号： US12717164申请日： 2010-03-04
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公开(公告)号： US20100227145A1公开(公告)日： 2010-09-09
- 发明人: Naomi TERATANI , Yuji KATSUDA
- 申请人： Naomi TERATANI , Yuji KATSUDA
- 申请人地址： JP Nagoya-City
- 专利权人： NGK Insulators, Ltd.
- 当前专利权人： NGK Insulators, Ltd.
- 当前专利权人地址： JP Nagoya-City
- 优先权： JP2009-054027 20090306
- 主分类号： C04B35/10
- IPC分类号： C04B35/10
摘要：
An aluminum oxide sintered body of the invention includes: europium and nitrogen; and plate-like crystals having peaks coinciding with EuAl12O19 in an X-ray diffraction profile dispersed over a whole sintered body. Such an aluminum oxide sintered body can be obtained by: forming a mixed powder containing an alumina powder, a europium compound powder and an aluminum nitride powder into a green body having a predetermined shape; and sintering the green body under a non-oxidizing atmosphere.
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