发明申请
US20100224343A1 WORK CARRIER 审中-公开
工作承运人

WORK CARRIER
摘要:
A work carrier includes a work carrying mechanism, a cooling pipe for cooling the work carrying mechanism by circulation of a coolant, a thermally-conductive elastic member held in contact with the work carrying mechanism and the cooling pipe, and a fixing element for fixing the cooling pipe to the work carrying mechanism. The elastic member is made of aluminum, for example. Before fixed, the elastic member is bent in a cross section perpendicular to the longitudinal direction of the cooling pipe.
信息查询
0/0