发明申请
US20100084582A1 METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN ION IMPLANTER
有权
用于控制离子植入物中光束电流均匀性的方法和装置
- 专利标题: METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN ION IMPLANTER
- 专利标题(中): 用于控制离子植入物中光束电流均匀性的方法和装置
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申请号: US12244978申请日: 2008-10-03
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公开(公告)号: US20100084582A1公开(公告)日: 2010-04-08
- 发明人: D. Jeffrey LISCHER , John (Bon-Woong) KOO , Peter F. KURUNCZI , Shardul PATEL , Wilhelm P. PLATOW
- 申请人: D. Jeffrey LISCHER , John (Bon-Woong) KOO , Peter F. KURUNCZI , Shardul PATEL , Wilhelm P. PLATOW
- 申请人地址: US MA Gloucester
- 专利权人: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- 当前专利权人: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- 当前专利权人地址: US MA Gloucester
- 主分类号: H01J37/08
- IPC分类号: H01J37/08
摘要:
An ion implantation system for neutralizing the space charge effect associated with a high current low energy ion beam. The implantation system includes an ion source configured to receive a dopant gas and generate ions having a particular energy and mass from which ions are extracted through an aperture. A work piece positioned downstream of the ion source for receiving the extracted ions in the form of an ion beam. A bleed gas channel disposed between the ion source and the work piece. The bleed gas channel supplying a gas used to neutralize the space charge effect associated with the ion beam.
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