发明申请
- 专利标题： Silicon emitters for ionizers with high frequency waveforms
- 专利标题（中）： 具有高频波形的电离器的硅发射器
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申请号： US12456526申请日： 2009-06-18
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公开(公告)号： US20090316325A1公开(公告)日： 2009-12-24
- 发明人: Peter Gefter
- 申请人： Peter Gefter
- 专利权人： MKS Instruments
- 当前专利权人： MKS Instruments
- 主分类号： H01T23/00
- IPC分类号： H01T23/00
摘要：
A method of creating low-particle ionizers by combining silicon-containing emitters and a high frequency AC voltage. The high frequency AC voltage provides voltage and current to the corona emitters of the ionizer. Within the scope of this invention, emitters or emitter surfaces contain 47% by weight (or more) of silicon. The combination of silicon-containing emitters and a high frequency AC voltage produces ionizers that are cleaner than prior art ionizers, based on particles greater than 10 nanometers. This improvement in cleanliness has been experimentally determined.
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