发明申请
- 专利标题: Fabricating Arrays Of Metallic Nanostructures
- 专利标题(中): 制造金属纳米结构阵列
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申请号: US12509689申请日: 2009-07-27
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公开(公告)号: US20090294755A1公开(公告)日: 2009-12-03
- 发明人: Philip J. Kuekes , M. Saif Islam , Shih-Yuan Wang , Alexandre M. Bratkovaski
- 申请人: Philip J. Kuekes , M. Saif Islam , Shih-Yuan Wang , Alexandre M. Bratkovaski
- 主分类号: H01L29/15
- IPC分类号: H01L29/15 ; B05C11/00
摘要:
A patterned array of metallic nanostructures and fabrication thereof is described. A device comprises a patterned array of metallic columns vertically extending from a substrate. Each metallic column is formed by metallically coating one of an array of non-metallic nanowires catalytically grown from the substrate upon a predetermined lateral pattern of seed points placed thereon according to a nanoimprinting process. An apparatus for fabricating a patterned array of metallic nanostructures is also described.
公开/授权文献
- US07989798B2 Fabricating arrays of metallic nanostructures 公开/授权日:2011-08-02
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