Invention Application
- Patent Title: Ion Implanter For Photovoltaic Cell Fabrication
- Patent Title (中): 离子插入机用于光伏电池制造
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Application No.: US12122108Application Date: 2008-05-16
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Publication No.: US20090283669A1Publication Date: 2009-11-19
- Inventor: Thomas Parrill , Aditya Agarwal
- Applicant: Thomas Parrill , Aditya Agarwal
- Main IPC: H01J49/26
- IPC: H01J49/26 ; G21K5/10
Abstract:
Ion implanters are especially suited to meet process dose and energy demands associated with fabricating photovoltaic devices by ion implantation followed by cleaving.
Public/Granted literature
- US07687786B2 Ion implanter for noncircular wafers Public/Granted day:2010-03-30
Information query
