Invention Application
- Patent Title: Laser processing apparatus
- Patent Title (中): 激光加工设备
-
Application No.: US12453613Application Date: 2009-05-15
-
Publication No.: US20090283506A1Publication Date: 2009-11-19
- Inventor: Kenji Okabe , Shoichi Tanaka , Masashi Kurokawa
- Applicant: Kenji Okabe , Shoichi Tanaka , Masashi Kurokawa
- Applicant Address: JP Kawasaki
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kawasaki
- Priority: JP2008-127887 20080515
- Main IPC: B23K26/38
- IPC: B23K26/38 ; B23K26/42

Abstract:
A laser processing apparatus is provided with a first laser oscillator for laser CVD and a second laser oscillator for laser repair in a laser oscillation section. Either one of the first or second laser beam is irradiated by switching the first and second laser oscillators by a laser oscillator switch portion of a main body section. An optical path forming member is disposed such that the first or second laser beam, whichever is irradiated, will take the same optical path and reach a sample, after passing a common slit, to perform laser processing on the sample. Further, an objective lens is configured to be switched to an objective lens having a magnification corresponding to a wavelength of the laser beam irradiated from the laser oscillation section by an objective lens switch section of an objective lens section.
Public/Granted literature
- US08071910B2 Laser processing apparatus Public/Granted day:2011-12-06
Information query
IPC分类: