Invention Application
US20090279099A1 METHOD FOR FABRICATING A SENSOR, A SENSOR, AND A METHOD FOR SENSING
有权
用于制造传感器,传感器和感测方法的方法
- Patent Title: METHOD FOR FABRICATING A SENSOR, A SENSOR, AND A METHOD FOR SENSING
- Patent Title (中): 用于制造传感器,传感器和感测方法的方法
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Application No.: US12436592Application Date: 2009-05-06
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Publication No.: US20090279099A1Publication Date: 2009-11-12
- Inventor: Wenhui WANG , Xingwei WANG
- Applicant: Wenhui WANG , Xingwei WANG
- Applicant Address: US MA Lowell
- Assignee: UNIVERSITY OF MASSACHUSETTS LOWELL
- Current Assignee: UNIVERSITY OF MASSACHUSETTS LOWELL
- Current Assignee Address: US MA Lowell
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01N29/14 ; H01L21/28

Abstract:
A method for fabricating a sensor, a sensor so fabricated, and a method for sensing a stimulus are provided. The method includes providing an elongated open channel, such as, a V-groove, in a substrate, the open channel providing a first surface; removing at least some material from at least a portion of the open channel to provide a second surface displaced from the first surface; positioning a diaphragm on the second surface; and positioning an elongated wave-guide having a beveled end in the elongated open channel wherein the beveled end is positioned over the diaphragm to define an interferometric cavity between the diaphragm and the outer surface of the wave-guide. The sensor so fabricated can provide an effective sensor for detecting acoustic emission waves, among other pressure waves.
Public/Granted literature
- US08174703B2 Method for fabricating a sensor, a sensor, and a method for sensing Public/Granted day:2012-05-08
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