发明申请
US20090265027A1 SERVER DEVICE AND PROGRAM 有权
服务器设备和程序

SERVER DEVICE AND PROGRAM
摘要:
A server device 12 constituting a group management system includes one or more manufacturing apparatuses 11 for performing a preset process on a target substrate, and the server device 12 includes a measurement information storage unit 1201 for storing therein one or more measurement information; an instruction receiving unit 1205 for receiving an output instruction of the measurement information, which contains information specifying a predetermined start point and valid time information; a measurement information acquisition unit 1203 for acquiring, from the measurement information storage unit 1201, measurement information ranging from the predetermined start point to a time point of the valid time; an output information composing unit 1206 for composing output information by using the acquired measurement information; and an output unit 1207 for outputting the output information composed by the output information composing unit 1206.
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