发明申请
- 专利标题: SERVER DEVICE AND PROGRAM
- 专利标题(中): 服务器设备和程序
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申请号: US12375693申请日: 2007-07-09
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公开(公告)号: US20090265027A1公开(公告)日: 2009-10-22
- 发明人: Masashi Takahashi , Minoru Obata , Noriaki Koyama
- 申请人: Masashi Takahashi , Minoru Obata , Noriaki Koyama
- 申请人地址: JP Tokyo
- 专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人地址: JP Tokyo
- 优先权: JP2006-209425 20060801
- 国际申请: PCT/JP2007/063665 WO 20070709
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A server device 12 constituting a group management system includes one or more manufacturing apparatuses 11 for performing a preset process on a target substrate, and the server device 12 includes a measurement information storage unit 1201 for storing therein one or more measurement information; an instruction receiving unit 1205 for receiving an output instruction of the measurement information, which contains information specifying a predetermined start point and valid time information; a measurement information acquisition unit 1203 for acquiring, from the measurement information storage unit 1201, measurement information ranging from the predetermined start point to a time point of the valid time; an output information composing unit 1206 for composing output information by using the acquired measurement information; and an output unit 1207 for outputting the output information composed by the output information composing unit 1206.
公开/授权文献
- US08055391B2 Server device and program 公开/授权日:2011-11-08
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