发明申请
US20090263592A1 PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF ADVANCED LUBRICANT FOR THIN FILM STORAGE MEDIUM
审中-公开
用于薄膜储存介质的高级润滑剂等离子体增强化学气相沉积
- 专利标题： PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF ADVANCED LUBRICANT FOR THIN FILM STORAGE MEDIUM
- 专利标题（中）： 用于薄膜储存介质的高级润滑剂等离子体增强化学气相沉积
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申请号： US12414333申请日： 2009-03-30
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公开(公告)号： US20090263592A1公开(公告)日： 2009-10-22
- 发明人: Jianwei Liu , Michael Joseph Stirniman , Jing Gui , Lei Li , Yiao-Tee Hsia
- 申请人： Jianwei Liu , Michael Joseph Stirniman , Jing Gui , Lei Li , Yiao-Tee Hsia
- 申请人地址： US CA Scotts Valley
- 专利权人： Seagate Technology LLC
- 当前专利权人： Seagate Technology LLC
- 当前专利权人地址： US CA Scotts Valley
- 主分类号： C23C16/513
- IPC分类号： C23C16/513
摘要：
A magnetic recording medium including a solid lubricant film containing a plasma-enhanced chemical vapor deposited perfluoropolyether is disclosed. Preferably, the solid lubricant is formed in the presence of oxygen and longer fluorocarbon chain to form perfluoropolyether, thereby enhancing the chain flexibility perfluoropolyether and in the presence of a hydrocarbon to stabilize the process, thereby allowing process control.
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