发明申请
US20090206239A1 INSPECTING METHOD FOR OBJECTIVE LENS DRIVING DEVICE AND INSPECTING APPARATUS FOR THE SAME 失效
目标镜头驱动装置的检查方法及其检测装置

INSPECTING METHOD FOR OBJECTIVE LENS DRIVING DEVICE AND INSPECTING APPARATUS FOR THE SAME
摘要:
An inspecting method for an object lens driving device including a base, an objective lens, a holder for holding the objective lens on the base, and a drive mechanism for driving the holder so as to move the objective lens in the focus direction, the method comprising the steps of: emitting a laser beam through the objective lens; allowing the laser beam emitted through the objective lens to pass through an aperture having a predetermined diameter; applying to the drive mechanism a drive voltage for moving the holder between a first position closest to a surface of the base and a second position farther than the first position from the surface of the base; performing photoelectric conversion of the laser beam having passed through the aperture; and inspecting the objective lens driving device based on a signal obtained by the photoelectric conversion.
信息查询
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