发明申请
US20090181478A1 Methods of depositing nanomaterial & methods of making a device
有权
沉积纳米材料的方法和制造器件的方法
- 专利标题： Methods of depositing nanomaterial & methods of making a device
- 专利标题（中）： 沉积纳米材料的方法和制造器件的方法
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申请号： US12287145申请日： 2008-10-06
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公开(公告)号： US20090181478A1公开(公告)日： 2009-07-16
- 发明人: Marshall Cox , LeeAnn Kim , Craig Breen , Maria J. Anc , Seth Coe-Sullivan , Peter T. Kazlas
- 申请人： Marshall Cox , LeeAnn Kim , Craig Breen , Maria J. Anc , Seth Coe-Sullivan , Peter T. Kazlas
- 主分类号： H01L33/00
- IPC分类号： H01L33/00 ; H01L21/02
摘要：
Methods for depositing material and nanomaterial onto a substrate are disclosed. Also disclosed are methods of making devices including nanomaterials, and a system useful for depositing materials and nanomaterials.
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