发明申请
US20090180855A1 Pivot arm assembly for semiconductor wafer handling robots and method for making the same
有权
用于半导体晶片处理机器人的枢轴臂组件及其制造方法
- 专利标题: Pivot arm assembly for semiconductor wafer handling robots and method for making the same
- 专利标题(中): 用于半导体晶片处理机器人的枢轴臂组件及其制造方法
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申请号: US12008439申请日: 2008-01-11
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公开(公告)号: US20090180855A1公开(公告)日: 2009-07-16
- 发明人: William Daniel Schmidt , Scott A. Hansen , Gregory A. Clary , David S. Dailey
- 申请人: William Daniel Schmidt , Scott A. Hansen , Gregory A. Clary , David S. Dailey
- 主分类号: H01L21/687
- IPC分类号: H01L21/687 ; B25J18/04 ; F16C31/04 ; B23P17/00 ; F16H1/00
摘要:
A method for making a robot pivot arm assembly includes forming from a rigid, machinable material a circular disk, and forming a circular aperture through the center of the disk. An outer bearing track is formed integrally in the inside surface which defines the aperture, and the apertured disk is positioned in a machining device with a fixturing portion that engages the outer bearing track. An integral outer race, an arm and a gear segment with teeth are then machined into the disk to form the outer portion of the pivot arm assembly. An inner race with an inner bearing track is positioned inside the integral outer race, and rolling bearing elements are inserted into the first and second bearing tracks.
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