发明申请
- 专利标题: Heating system and method for microfluidic and micromechanical applications
- 专利标题(中): 微流控和微机械应用的加热系统和方法
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申请号: US12005862申请日: 2007-12-27
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公开(公告)号: US20090169190A1公开(公告)日: 2009-07-02
- 发明人: Ming Fang , Fuchao Wang
- 申请人: Ming Fang , Fuchao Wang
- 申请人地址: US TX Carrollton
- 专利权人: STMicroelectronics, Inc.
- 当前专利权人: STMicroelectronics, Inc.
- 当前专利权人地址: US TX Carrollton
- 主分类号: F24H1/10
- IPC分类号: F24H1/10 ; H01L21/02
摘要:
An integrated semiconductor heating assembly includes a semiconductor substrate, a chamber formed therein, and an exit port in fluid communication with the chamber, allowing fluid to exit the chamber in response to heating the chamber. The integrated heating assembly includes a first heating element adjacent the chamber, which can generate heat above a selected threshold and bias fluid in the chamber toward the exit port. A second heating element is positioned adjacent the exit port to generate heat above a selected threshold, facilitating movement of the fluid through the exit port away from the chamber. Addition of the second heating element reduces the amount of heat emitted per heating element and minimizes thickness of a heat absorption material toward an open end of the exit port. Since such material is expensive, this reduces the manufacturing cost and retail price of the assembly while improving efficiency and longevity thereof.
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