Invention Application
- Patent Title: MEMS MICROSWITCH HAVING A CONDUCTIVE MECHANICAL STOP
- Patent Title (中): 具有导电机械停止功能的MEMS微控制器
-
Application No.: US11961767Application Date: 2007-12-20
-
Publication No.: US20090159410A1Publication Date: 2009-06-25
- Inventor: Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
- Applicant: Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
- Applicant Address: US NY Schenectady
- Assignee: GENERAL ELECTRIC COMPANY
- Current Assignee: GENERAL ELECTRIC COMPANY
- Current Assignee Address: US NY Schenectady
- Main IPC: H01H57/00
- IPC: H01H57/00
Abstract:
A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.
Public/Granted literature
- US07609136B2 MEMS microswitch having a conductive mechanical stop Public/Granted day:2009-10-27
Information query
