Invention Application
US20090153625A1 CAPACITOR, METHOD OF MANUFACTURING THE SAME, METHOD OF MANUFACTURING FERROELECTRIC MEMORY DEVICE, METHOD OF MANUFACTURING ACTUATOR, AND METHOD OF MANUFACTURING LIQUID JET HEAD
审中-公开
电容器及其制造方法，制造电磁存储器件的方法，制造执行器的制造方法和制造液体喷射头的方法
- Patent Title: CAPACITOR, METHOD OF MANUFACTURING THE SAME, METHOD OF MANUFACTURING FERROELECTRIC MEMORY DEVICE, METHOD OF MANUFACTURING ACTUATOR, AND METHOD OF MANUFACTURING LIQUID JET HEAD
- Patent Title (中): 电容器及其制造方法，制造电磁存储器件的方法，制造执行器的制造方法和制造液体喷射头的方法
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Application No.: US12335637Application Date: 2008-12-16
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Publication No.: US20090153625A1Publication Date: 2009-06-18
- Inventor: Daisuke KOBAYASHI , Masao NAKAYAMA , Takeshi KIJIMA
- Applicant: Daisuke KOBAYASHI , Masao NAKAYAMA , Takeshi KIJIMA
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2005-244441 20050825
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/00
Abstract:
A method of manufacturing a capacitor, including: forming a lower electrode on a substrate; forming a dielectric film of a ferroelectric or a piezoelectric on the lower electrode; forming an upper electrode on the dielectric film; and forming a silicon oxide film so that at least the dielectric film is covered with the silicon oxide film, the silicon oxide film being formed by using trimethoxysilane.
Public/Granted literature
- US2117564A Refrigerator Public/Granted day:1938-05-17
Information query
IPC分类:
