Invention Application
US20090146547A1 FIELD ELECTRON EMISSION SOURCE AND METHOD FOR MANUFACTURING THE SAME 有权
场电子发射源及其制造方法

FIELD ELECTRON EMISSION SOURCE AND METHOD FOR MANUFACTURING THE SAME
Abstract:
A method for manufacturing a field electron emission source includes: providing an insulating substrate; patterning a cathode layer on at least one portion of the insulating substrate; forming a number of emitters on the cathode layer; coating a photoresist layer on the insulating substrate, the cathode layer and the emitters; exposing predetermined portions of the photoresist layer to radiation, wherein the exposed portions are corresponding to the emitters; forming a mesh structure on the photoresist layer; and removing the exposed portions of photoresist layer. The method can be easily performed and the achieved the field electron emission source has a high electron emission efficiency.
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